半導體製程名詞縮寫
2009/03/14 10:15
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被朋友拉來開了這個部落格,一直在思索可以擺些甚麼供大家參考;既然在半導體這一行作,就還是說一些自己比較熟悉的東西吧!因為是work in progress,還請大家多多忍耐。
AA Active Area
ISSG In Situ Steam Generation
RIE Reactive Ion Etching
ARC Anti-Reflective Coating
CMP Chemical Mechanical Polish
STI Shallow Trench Isolation
BSG Boro-Silicate-Glass
HTO High Temperature Oxide
RTCVD Papid Thermal Chemical Vapor Deposition
HDP High-Density Plasma
RTN Rapid Thermal Nitridation
TEOS TetraEthyl OrthoSilicate
ONO Oxide-Nitride-Oxide (SiO2-Si3N4-SiO2)
LDD Lightly-Doped-Drain
SAE Selective Area Epitaxy
PMD Pre-Metal Dielectric
IMD Inter-Metal Dielectric
OPC Optical Proximity Correction
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